Pfeiffer 普發(fā)TMU521P分子泵維修,Pfeiffer TMU521P普發(fā)渦輪分子泵進(jìn)氣法蘭口DN 100 CF-F/DN 160 CF-F,出氣法蘭口 DN 25 ISO-KF,DN 100 CF-F抽速可達(dá)到290 L/s, DN 160 CF-F抽速可達(dá)到510 L/s,833HZ轉(zhuǎn)速為50000 rpm,550HZ轉(zhuǎn)速為33000 rpm,極限真空5X10-10 mbar, Pfeiffer普發(fā)TMU521P分子泵對(duì)應(yīng)的控制器為:Pfeiffer TC600等。