| 鐢�(ch菐n)鍝佸弮鏁�(sh霉) | |||
|---|---|---|---|
| 鍝佺墝 | 闆峰凹绱筊ENISHAW | ||
| 鐢�(ch菐n)鍝佺壒鎬� | 鐪熺┖涓嬩娇鐢� | ||
| 鍒嗚鲸鐜� | 0.1UM | ||
| 鎳�(y墨ng)鐢ㄩ牁(l菒ng)鍩� | ***/鑸ぉ | ||
| 绋 | 1000000486 | ||
| 鍙敭璩ｅ湴 | 鍏ㄥ湅 | ||
| 鍨嬭櫉 | UHV | ||
鐪熺┖?(UHV)?鍏夋煹锛岀湡绌哄厜鏌靛寘鎷湡绌哄湏鍏夋煹鍜岀湡绌虹洿绶氬厜鏌靛昂锛�
UHV鐢�(ch菐n)鍝佺壒寰佸涓嬶細
鈥�?RESOLUTE?UHV鏄� 閬╁悎鍦║HV鐠�(hu谩n)澧冧笅浣跨敤鐨勫€肩湡绌哄紡鍏夋煹
鈥�?鐢辩湡绌哄吋瀹规潗鏂欏拰绮樺悎鍔戝埗鎴�锛屽嚭姘ｇ巼浣�
鈥�?娈樹綑姘ｉ珨鍒嗘瀽?(RGA)?缍�(j墨ng)椹楄瓑涓嶆渻姹℃煋鐪熺┖鐠�(hu谩n)澧�
鈥�?120?掳C鐑樼剻婧害
鈥�?闈炴帴瑙搁枊鏀惧紡鍏夊(xu茅)绯荤当(t菕ng)鎻愪緵楂橀€�銆佸彲闈犵殑鎿嶄綔锛屾懇鎿﹀拰纾ㄦ悕鍧囩偤闆�
鈥�?鍏峰倷宸ユキ(y猫)妯�(bi膩o)婧�(zh菙n)鐨勬ā鎿拰鏁�(sh霉)瀛楄几鍑�锛屽垎杈ㄧ巼閬�1?nm
鈥�?闆昏€椾綆銆佺櫦(f膩)鐔卞皬
鈥�?鐒℃埃瀵嗗瓟
鈥�?鑷仼鎳�(y墨ng)闆昏矾鍙彁渚� 闀锋湡鍙潬鎬у拰浣庨浕瀛愮窗鍒�
瑾ゅ樊?(SDE)锛圧ESOLUTE?UHV鐐郝�40?nm锛孴ONiC?UHV鐐郝�30?nm锛孯GH25F?UHV鍜�
RGH20F?UHV鐐郝�50?nm)
鈥�?UHV鍏煎闆荤簻
鈥�?TONiC?UHV鍏夋煹鍏锋湁鍏夊(xu茅)鍙冭€冮浂浣�
鈥�? 鐩寸窔鍏夋煹鍜屽湏鍏夋煹绯诲垪
RESOLUTE?UHV銆乀ONiC?UHV銆丷GH25F
UHV鍜孯GH20F?UHV璁€鏁�(sh霉)闋�
闆峰凹绱� 鐪熺┖?(UHV)?鍏煎鍏夋煹绯诲垪涓殑鎵€鏈夌敘(ch菐n)鍝侀兘缍�(j墨ng)閬� 瑷�(sh猫)瑷�锛岀敤浜庡悇绋瀛�(xu茅)銆佸崐灏�(d菐o)楂�
鍜屽叾浠栭珮绱氬伐妤�(y猫)鎳�(y墨ng)鐢ㄥ牬鍚�锛岀湡绌哄鍔涢仈10-11?Torr銆傚叾鍩烘湰宸ヤ綔鍘熺悊鑸囨垜鍊戠殑鍚岄妯�(bi膩o)婧�(zh菙n)澶ф埃澹撲笅鐨勭敘(ch菐n)
鍝佺浉鍚�锛屼絾鏄疷HV鍏夋煹鍦ㄨō(sh猫)瑷堜笂娑堥櫎姘ｅ瘑瀛�锛屽苟涓旂敱娼斿噲鐨勭湡绌哄吋瀹规潗鏂欏拰绮樺悎鍔� 鑰屾垚銆傜敘(ch菐n)
鍝佸湪UHV鐠�(hu谩n)澧冧笅鐨勯仼鐢ㄦ€у凡鐛插緱鐛ㄧ珛鐨� 妾㈤绔欓憭瀹�锛屽寘鎷畼鐣欐埃楂斿垎鏋�?(RGA)?鍏夎瓬娓│銆�
瑭茬郴鍒楀寘鎷琑ESOLUTE銆乀ONiC銆丷GH25F鍜孯GH20F璁€鏁�(sh霉)闋紝浠ュ強鍚勭ó鐩寸窔鍏夋煹鍜屽湏鍏�
鏌�锛屾彁渚� 鐨勬€ц兘鍜岄珮鍙潬鎬�銆�
RESOLUTE?UHV閲囩敤鐪熸鎰忕京涓婄殑寮忓厜鏌靛伐浣滃師鐞�锛岃垏RESOLUTE绯诲垪鐨勫叾浠栫敘(ch菐n)鍝佺浉
鍚�銆傚洜姝ゅ厜鏌靛叿鍌欏皬鏌佃窛鎬ц兘锛屽苟涓斿畨瑁濆叕宸ぇ锛屽収(n猫i)鍦ㄥ畨鍏ㄦ€ч珮銆俁ESOLUTE闁嬪暉鍚庣珛鍗崇⒑瀹�
浣嶇疆锛屾笡灏戦潪鍙楁帶閬嬪嫊锛屽苟涓旀湁鍔╀簬鍩�(zh铆)琛� 杌稿懡浠わ紝鐒￠渶杩斿洖鍩烘簴(zh菙n)浣嶇疆鎴栬€呪€滈枊鍟熷苟鏅�
鍕曗€�銆俁ESOLUTE鐨勫垎杈ㄧ巼鐐�1?nm锛岄浕瀛愮窗鍒嗚宸�?(SDE)?鐐郝�40?nm锛孯MS鍣煶<10?nm锛屽悓鏅備篃
骞姪鐢ㄦ埗 鎻�
瑭茬郴鍒椾腑鐨勬墍鏈夊閲忓紡璁€鏁�(sh霉)闋兘鍖呭惈鍕曟厠(t脿i)淇¤櫉瑾�(di脿o)鏁村姛鑳斤紝鍏朵腑鑷嫊澧炵泭鎺у埗?(AGC)?鏈夊姪浜庨暦
鏅傞枔鍏�(n猫i)鐛插彇 鐨勪俊铏�锛岃€岃嚜鍕曞亸缃噺鎺у埗?(AOC)?鍓囨湁鍔╀簬鎻愰珮淇¤櫉淇濈湡搴︺€侫OC鍜屽厜鏌电殑
浣庝綅缃櫔鑱蹭篃鏈夊姪浜庨檷浣庣洿椹�(q奴)绯荤当(t菕ng)鐨勯€熷害娉㈠嫊锛屽緸鑰屽湪绋嬪害涓婂公鍔╂笡灏戠湡绌烘浠朵笅闆绘涓⿳
鑱氱殑鐔遍噺銆�
閫氶亷鐩寸窔娓噺妯�(bi膩o)婧�(zh菙n)纰轰繚浜� 锛屽叾涓寘鎷嚜璨煎紡閶煎付鏌靛昂銆佷笉閵归嫾鍜孼eroMet鏌靛昂閬搁爡銆傚湏
鍏夋煹閬搁爡鍖呮嫭杓曡杽灏忓阀鐨凴ESR?/?RESM鍜岃秴 鐨凴EXM鍦撴煹锛� 搴� 鍎�(y艒u)浜幝�1瑙掔銆�
