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檢測(cè)用的儀器與檢測(cè)定位精度所用的相同。一般檢測(cè)方法是在靠近各坐標(biāo)行程中點(diǎn)及兩端的任意三個(gè)位置進(jìn)行測(cè)量，每個(gè)位置用快速移動(dòng)定位，在相同條件下重復(fù)7次定位，測(cè)出停止位置數(shù)值并求出讀數(shù)最大差值。以三個(gè)位置中最大一個(gè)差值的二分之一，附上正負(fù)符號(hào)，作為該坐標(biāo)的重復(fù)定位精度，它是反映軸運(yùn)動(dòng)精度穩(wěn)定性的最基本指標(biāo)。
3、直線運(yùn)動(dòng)的原點(diǎn)返回精度檢測(cè)
原點(diǎn)返回精度，實(shí)質(zhì)上是該坐標(biāo)軸上一個(gè)特殊點(diǎn)的重復(fù)定位精度，因此它的檢測(cè)方法完全與重復(fù)定位精度相同。
4、直線運(yùn)動(dòng)的反向誤差檢測(cè)
直線運(yùn)動(dòng)的反向誤差，也叫失動(dòng)量，它包括該坐標(biāo)軸進(jìn)給傳動(dòng)鏈上驅(qū)動(dòng)部位(如伺服電動(dòng)機(jī)、伺趿液壓馬達(dá)和步進(jìn)電動(dòng)機(jī)等)的反向死區(qū)，各機(jī)械運(yùn)動(dòng)傳動(dòng)副的反向間隙和彈性變形等誤差的綜合反映。誤差越大，則定位精度和重復(fù)定位精度也越低。
反向誤差的檢測(cè)方法是在所測(cè)坐標(biāo)軸的行程內(nèi)，預(yù)先向正向或反向移動(dòng)一個(gè)距離并以此停止位置為基準(zhǔn)，再在同一方向給予一定移動(dòng)指令值，使之移動(dòng)一段距離，然后再往相反方向移動(dòng)相同的距離，測(cè)量停止位置與基準(zhǔn)位置之差。在靠近行程的中點(diǎn)及兩端的三個(gè)位置分別進(jìn)行多次測(cè)定(一般為7次)，求出各個(gè)位置上的平均值，以所得平均值中的最大值為反向誤差值。
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