6DD1606-0AD0
6DD1606-0AD0
6DD1606-0AD0
此生產流程有三個工段：壓縮吸附工段、冷凍液化工段、精餾儲存工段。常壓、低于40℃的原料氣，經(jīng)過一次分水和三級壓縮,氣體壓力增加到3.0Mpa，進入第二分水器進一步分水，再進入干燥器干燥，之后工業(yè)級二氧化碳原料氣進入預冷器，食品級二氧化碳經(jīng)吸附床吸附后也進入預冷器。經(jīng)預冷器冷卻后，原料二氧化碳氣體溫度降到24℃以下。以上為壓縮吸附工段，下一道工序為冷凍液化工段。經(jīng)此工段冷凍液化后的原料二氧化碳溫度降到-12℃，之后進入精餾儲存工段。工業(yè)級原料二氧化碳經(jīng)閃蒸罐后，直接進入工業(yè)級二氧化碳成品貯存罐，食品級原料二氧化碳則需經(jīng)過精餾塔精餾，成為高純度的食品級成品。
2．系統(tǒng)功能和結構
2．1 監(jiān)控系統(tǒng)的功能：
1）工藝流程的現(xiàn)場控制。此生產線共有14個控制回路。其中，11個單回路、三個串級控制回路。包括2個壓力控制、7個液位控制、4個溫度控制、1個流量控制。
2） 遠程控制?？刂婆_實現(xiàn)每個回路的軟手動/自動兩種控制方式的選定和每路控制參數(shù)的設定。
3）流程顯示。實現(xiàn)整個生產線各工段的實時監(jiān)視界面。
4）趨勢顯示。生產流程中的實時數(shù)據(jù)和歷史數(shù)據(jù)的趨勢曲線顯示。
5）數(shù)據(jù)存檔和報表。實時數(shù)據(jù)的存檔，歷史數(shù)據(jù)的查詢及報表打印。
6）故障報警。對生產過程中的故障進行及時報警及相應的故障提示信息。
7）雙機熱備份運行，確保生產線的無間斷安全生產。
2．2 監(jiān)控系統(tǒng)的結構
目前監(jiān)控系統(tǒng)通常采用RS-485完成現(xiàn)場和上位機的通信，但這種方式?jīng)]有媒體訪問控制(MAC)機制，通信能力和資源共享能力差。而使用IEC61158的現(xiàn)場總線，顯然對于這個小型系統(tǒng)來說是不經(jīng)濟的。以太網(wǎng)有完整的通信協(xié)議，能實現(xiàn)多種網(wǎng)絡功能，但是它是面向商業(yè)的網(wǎng)絡，所以在實時性和抗干擾能力等方面較差。綜合考慮二者的特點和系統(tǒng)實現(xiàn)的性能價格比，本系統(tǒng)應用以太網(wǎng)實現(xiàn)遠程通信和資源共享，也便于系統(tǒng)的擴展和公司的信息化管理；同時，借鑒了FCS的系統(tǒng)設計思想，將控制下放到現(xiàn)場完成，實現(xiàn)了現(xiàn)場的實時控制功能并保證了控制的可靠性。
Horiba CS-151 Conc. Mon., Fiber Optic CS-151F1-0510-QU
5" GSD DISK, 125mm Wafer Process, 1183060C
PLASMOS ELLIPSOMETER, SD2000
BLUE POWER TRANSFORMER, TE3B-150K-GN-NF
Air Products Manifold, Main SG 100 1491-3113-1A
Kensington, Robot WFH4C-TT/SR/HS
White Knight Pump AP300
5" GSD DISK, 125mm Wafer Process, 1183060
Allen-Bradley 10" Panel Color Touchscreen 2711-T10C16
Air Products Chemguard Controller 839-607436
White Knight Pump AP200
Kensington, Robot WFH3C-TT/SR/HS
Air Products 2Cyl AXO-AP1510SM-NH?3 807-470626502A
Edwards QDP80 Dry Pump
Air Products 2Cyl AXO-AP1402TSMA-?WF6 214463
TEL Liner, SIC Low Temp,Pyro, Gate Ox, DS1105
TEL Liner, SIC Low Temp, Pyro Gate Ox, DS1105-200493-1?3
Air Products 2Cyl AXO-AP1510SHM-H?Br,HCl 46635
Kensington, Pre-aligner and Controller
LAM Variable Gap Drive
SEIKO-SEIKI SCU-300H TURBO MOLECULAR PUMP CONTROLLER
Thermo Polysonics Ultrasonic Flowmeter KC-DCT1088
LAM Inner Gate Assembly (Fully refurbished with order)
Used CTI CryoTorr 8F, 8033295 w/ Gate Valve
DATA INSTRUMENTS DATA ACQUISITION SYSTEM, DI-500-16-P
One (1) As-Is Variable Gap Drive for a LAM9600
White Knight AP200 Rebuild Kit RBAP200-1
SEIKO-SEIKI TURBO MOLECULAR PUMP STP-300H
Det-Tronics Dual Spectrum IR flame detector PM-5MPX
USHIO HB-251B/A-AF/HB?-25103BY Lamp Housing & Controller
Allen-Bradley SLC 5/05 16K user memory KC-1747-L551
FALA Industries Centura HP Robot PM Kit H22589
AMAT CTI Cryogenics Cryopump w/ACM, 8116081G006
SMC Solenoid Pneumatic Harness, Right, CG400 122972
SMC Solenoid Pneumatic Harness, Left, CG400 122935
HUBER UNIPUMP II, NEW IN BOX
Infineion Technologies Valve Control Box KC-VCB
K-PATENTS SENSOR W/10-32 PORT FOR N2 PURGE
Air Products Pigtail for B2H6/N2 cabinet 809-470790604A
K-PATENTS INDICATING TRANSMITTER, IT-RU-GP
KLA Instruments Mass Memory PCB 710-658051-20 REV F0
KLA Instruments Corner Turn PCB 710-655651-20
ESI 100uL Nebulizer ES-2002
GREEN TWEED O-RING, ALD CHEMRAZ, 18.955 ID X 0.275 W
Applied Materials ASSEMBLY, ESC POWER SUPPLY 0010-40239
DNS Robot Assembly For Model 60A, 150mm
HP Semiconductor Parametric Analyzer 4145A
MKS THROTTLING VALVE, 656A-15267
LEYBOLD, CHEMICAL FILTER, NEW, CFS40-65
CERADYNE HEATER ASSEMBLY 200MM TF-101-9-1
Swagelok Process out stick- 809-470313915A
TEL Baffle, Quartz, 1B05-200052-13
INOVA STAGE SHIELD, CLAMPLESS, CLEANED 17-112194-00
Olympus Microscope
CTI Cryogenic Cryo-Torr High Vacuum Pump
SEMITOOL/ FILTER PUMP INDUSTRIES FILTER CHAMBER
MKS Baratron Capacitance Manometer 626A-12319
Air Products Monochrome Display Kit 287-607997
LEICA STEREOZOOM 4
Pentagon Tech Quartz, Bell Jar, Q15-0130
TEL T-CDFVN VOS-40-014 0 IS DIF DS 1187-072378-14
SIEMENS 6ES5242-1AA32 SIMATIC S5
Ushio Control Unit HB-25103BY-C
ASYST INDEXER MASTER CONTROLLER
LAM Kit, crtsy, cal, te 843-022046-001
LAM KIT, CRTSY, REMOVAL, TUN ESC 843-02246-002
LAM Kit, crtsy, cal, te 843-022046-001 REV B
CPU, PROG. EPROM DC:5/99855-0104?09-007
DYNATRONIX PROGRAMABLE PULSE POWER SUPPLY, 104/1-1-3
LAM RING FOCUS, THIN EDGE, 8' 4428 716-011638-008
Burks Close Coupled Centrifugal Pump
Semitool 50 Wafer Carrierless Rotor
SIMCO Pulse Flow Controller Ionization Kit, 10 Chamber
LEYBOLD ARW6000 ABSORBER
Semitool 50 Wafer Carrierless Rotor
ESI PFA Pure Chamber & PFA cap ES-2100-5472
Air Products Plis Interface Box 0010-30002
Cyonics, LASER POWER SUPPLY 120VAC 2.4AMPS, 2114-20SLK
Olympus BH Microscope
PALL Megaplast G2 w/Chemraz O-Rings PFGF1P12H12
Green Tweed HDP, L-Motion, Bonded SV, 5641A-1282-SC63?9
ENVIRCO PERFORMANCE MACH 10 HEPA FILTER, 69506-018
MRC Eclipse Control Board PCB 884-13-000
PALL TRINITY FILTER HOUSING 25UPS1G, 4HD4886-2316
BRUSHLESS DC MOTOR SERVO, RATIO 1/80 T61105-59
NT INTERNATIONAL TRANSDUCER ACID 1/2 FLR 0-60 PSI 4210-
EUROTHERM POWER SUPPLY, 661/01/00
Swagelok Process out stick 809-470314915A
APPLIED MATERIALS ION / TC BOX CONTROLLER, 01-81911-00
LAM ASSY, PCB, ADIO - AO, 810-017031-004
Leitz Wetzlar PL Fluotar 50x/0.85 567013
GRANITE MICROSYSTEMS COMPUTER, 1 GHZ, 256M RAM
FURON VALVE 3-WAY PNEUMATIC MOB3-122HP
Entegris Pressure Transducer 41501-110G-F04-?B12-A-S3
Entegris 1" PFA Hand Valve, DS16-2ML-16F
Semitool 200MM End Effector Stiffen Style
SIMCO Ionization Kit 4009012
SIMCO Ionization Kit 4008899
Fortrend Model F8225 Wafer Transfer Unit
Microvision MVT 1080 Wafer Inspection Station, used
Acopian DC Power Supply A75HT560 MRC Eclipse Star
DNS Hot Plate Assembly For Model 60A, 150mm
CUTLER-HAMMER CIRCUIT BREAKER, HFD3175L
D SQUARED TRANSFORMER, 45T3HFI5NLP
BLOWER In Great Condition
Front End Load Port
MICROPUMP HEAD L15368, 2170/56C
USHIO UV LAMP SUV-2002NIL
USHIO UV LAMP SUV-2011NI
White Knight AP-200 Pump Rebuild Tool Set KC-AP20-170
Schumacher ELOI Overlay, 1495-3174
Air Products, Spill alarm cable assembly, 2103-3615
AXIOMTEK COMPUTER ASSEMBLY BOARD SBC8360/ 73300-33
FUJI CIRCUIT BREAKER 150A 3PL GFI ELB EG203B
Mykrolis Stainless Steel Filter Housing KC-YY55P8000
HYTEC FLOW SYSTEMS ULTRAPURE HEAT EXCHANGER HFS-062/3
BALZERS QUARTZ GLASS MANTEL, BK221252
Air Products Cable Assembly Spill Detector 2103-0397
Applied Materials 0020-89990
NESLAB CHILLER, MODEL FTC-350A
NT INTERNATIONAL TRANSDUCER PRESSURE FLOW THRU 3/4"
Immersion Heater 4.8KW 208V 8.83X8.83 W/O TOP670217JS
Tosoh Honeywell Endura 5500 Target
SEMITOOL LINEAR RAIL ENCODER TAPE 62.75" T73311-02-0627
Swagelok Gas Hard Line Pigtail 1/2" FVCR 1495-3154A
Schumacher, Mother controller board, 1730-3005
Pneutronics Interface System
Air Products Pigtail Outlet, 1/4in MCVR 1495-3104A
KLA Instruments X-Interpolator PCB 710-658177-20 Rev C0
KLA Instruments Y-Interpolator C Ph. 3 710-658172-20
KLA Instruments X-Interpollator Ph. 3 710-658177-20
KLA Instruments Y-Interpolator C Ph. 3 710-658172-20
KLA Instruments Interface 1 Ph 3 710-658086-20 Rev E0
TEL Tokyo Electronics Cup 11851250-001
Semitool Rotor Kit PMR0333-01
MASTR III AUXILIARY RECEIVER
FLUKE 8500A DIGITAL MULTIMETER
KLA Inst Memory Controller Assy Ph 3 710-658232-00
SENSARRAY PROCESS PROBE WAFER, 1501A-8-0425
EUROTHERM POWER SUPPLY, 661-01-00
Semitool Rear Bowl Seal
Kalrez Rear Bowl Seal 4079
Mykrolis FIlter Microgard UPX .05um 10" CWUZ01P01
SensArray Corporation K-TYPE TC WAFER REFLOW 1630A-8-00
Fujikin Inc. 3/4 Auto Valve Stainless N.C. KC-FPR-71-19
Pentagon Tech Exclusion Ring, DC10046
GREEN TWEED o-ring, barrel 8528002139SD653
KLA Instruments Processor PCB 710-658046-00
KLA Instruments Defect Processor Phase 3 710-658076-20
PROCESS TECHNOLOGIES HEATER IMERSION KIT, HXOL4205CX
KLA Inst. Alignment Processor (API) Ph. 3 710-658036-20
PHOENIX CONTACT INTERBUS-S IBS 24 DI/32
Applied Materials Shield, Low Knee, AL/TI, 0020-28615
Horiba Stec Mass Flow System, SEC-500
Applied Materials 0100-35148
FUJI CIRCUIT BREAKER 100A 3PL EG103F
SEMITOOL POWER SUPPLY LOGIC 85-265/5 +12 100W 73147-18
Tokyo Seimitsu Board, Digital Divider, 294075
KLA Instruments Defect Filter PCB 710-659724-00 Rev C0
SERFILCO VERTICAL CENTRIFUGAL PUMP, OL100VPF-PEO
KLA Instruments DD Assembly PCB 710-650044-20 Rev C4
Tosoh Endura 5500 Target, 4029H-13-109-50?1
EUROTHERM AC SERVOMOTOR S102VN0440MQ10-?EL5
DAIFUKU DRIVER(TFE) ORIENTAL
LAM RING, CERAMIC FILLER - LAM
RORZE CORPORATION CONTROLLER, SEMIX MICRO COMPUTER
APPLIED MATERIALS INC.QUARTZ SHILED 125mm
ADVANCED MOTOR CONTROLS/AMPLIF?IED MOTOR CONTR. B15A8F
STEPPER MOTOR 5PHASE 0.02DEG/STEP by Vexta
Fiberguide Probe Low Light CB12120
SensArrayThermo?couple Process Probe Instr. Waffer
XYCARB CERAMICS RING, EXTERNAL QTZ 8" 0200-09222
CUTLER-HAMMER INDUSTRIAL CIRCUIT BREAKER, HFD3045L
Brooks Model S600-17 Robot
LAM Dual Bras Heat Exchanger, 2600568
LAM RING, HOT EDGE 6" 716-140163-001
SDI Model PDM-40a Control Box
APPLIED MATERIALS SUPPORT BAR, CATHODE DIAM. 16.5
DAIFUKU CO. LTD BOARD (MCP) DIAFUKU R.C. (S/R)
Watlow Columbia 11" FUSED HEATER BLANKET, F11211286A
THK SLIDE HORIZONTAL LOAD/UNLOAD 300mm, GL15S16+400L
EMOTEQ BLDC MOTOR AMPLIFIER, QB02300-T04-HBE
MKS MANOMETER, 124A-11465
HUTTINGER MASTER OSCILLATOR, MOP 2/13560
MKS MANOMETER, 0-1000, 128AA
LEYBOLD SYNCH MODULE FOR OMS3000
NSK LEAD SCREW BALL MINIMAG, W1203FA-3P-C5Z1?0
LAM RING, Coupling, ESC 8", JDA w/ Ceramic Ring
CGI, INC. GEARBOX, 10:1, 90 DEGREES, 23RN0100
Allen-Bradley 32-Channel Digital I/O Module SLC 500
Wafer Paddle, 398-19599-1
Wafer Paddle, 398-19335-1
KLA Instruments Alignment Processor Ph. 3 710-658041-20
Raytek Infrared Sensor with 10:1 Optics RAYMIC10LT
Air Products AP2 Front Panel Display Board 809-607056
KLA Instruments DF Assembly PCB 710-658086-20 Rev E0
Leica ∞/- PL Fluotar optics 10x/0.25 567050
Entegris 1/2" Pressure Transducer single port
NT INTERNATIONAL TRANSDUCER ACID 1/2"
PROPORTION AIR VALVE CONTROL SERVO SBNK PA72099-27
EUROTHERM AMPSTACK, 70A240N14-20MA
MKS MANOMETER, 10 TORR, 1/4 VCR, 223B-11463
Watlow Columbia Heater Blanket 14030089
Chem-flo Equipment, Inc Shuttle Assembly CP20-250
LAM/ BAY ADVANCED CYLINDER LIFTER 853-011661-001
BALDORMOTOR, B2HP, 3450 RPM, 2080V, CYOR35551
MAC Valves SOLENOID VALVE 5 3 WAY VALVES 20S CO11100120
Schumacher EMO Controller board 1730-3006 Rev. H
Allen-Bradley 32 Point Sourcing Input Card KC-1746-IB32
SEMITOOL MOTOR BRUSHLESS CENTURIUM 8" LEADS, 17410-40
Item title
Mykrolis Filter Intercept 0.2um, 10" IHAG01P01K
Vero Power Supply, New, PK-120
MILLIPORE 10" FILTER CARTRIDGE, CTFA01P01
MILLIPORE 10" FILTER CARTRIDGE, CTFA01P01
MILLIPORE 10" FILTER CARTRIDGE, CTFA01P01
APPLIED MATERIALS GAS DISTRIBUTION PLATE, 0020-31488
Asys Process Handler, ARO-140-AB-AB
Applied Materials 0020-84744
OPTICAL ENCODERS MOTOR FOUP DOOR ELEV WITH BRAKE
BALZERS MB-515V MAGNETIC SYSTEM, BK221940-T
APPLIED MATERIALS RING,CAPTURE,CE?RAMIC,145MM 0200-35350
MKS MANOMETER, 124A-11465
MAC Valves SOLENOID Bank 3 way VALVE 34B-L00-GDCA-1K?X
DEUTSCHE STAR LEAD SCREW BALL MINIMAG, 1532-4-9201
Air Products Surge Protection Kit w/base 809-607198
Applied Materials 0040-96353 Gas Line Valves
