S3A-DVK
S3A-DVK
S3A-DVK
這里把系統(tǒng)功能分成兩部分：現(xiàn)場(chǎng)級(jí)控制、監(jiān)控級(jí)控制?，F(xiàn)場(chǎng)級(jí)控制完成2.1所述的功能1），其余功能由監(jiān)控級(jí)完成?？刂葡到y(tǒng)的網(wǎng)絡(luò)拓?fù)浣Y(jié)構(gòu)如下圖二：
現(xiàn)場(chǎng)級(jí)的控制必須是可靠、實(shí)時(shí)的。在現(xiàn)場(chǎng)級(jí)的控制器中，PLC以其優(yōu)良的性能、多樣的可選系列和較好的性能價(jià)格比，在當(dāng)今控制領(lǐng)域占了主導(dǎo)地位。所以，在本系統(tǒng)中現(xiàn)場(chǎng)級(jí)控制器選用PLC.
監(jiān)控級(jí)的任務(wù)由工控機(jī)通過(guò)組態(tài)軟件來(lái)實(shí)現(xiàn)。遠(yuǎn)程監(jiān)控任務(wù)由工控機(jī)實(shí)現(xiàn)，這樣可以建立友好的人機(jī)界面，便于操作。使用組態(tài)軟件能方便的進(jìn)行系統(tǒng)變量的組態(tài)，易于開發(fā)人機(jī)界面，縮短項(xiàng)目的開發(fā)周期。
3．系統(tǒng)的功能實(shí)現(xiàn)
3．1 現(xiàn)場(chǎng)級(jí)控制功能的實(shí)現(xiàn)
現(xiàn)場(chǎng)控制器選用GE公司的90-30系列PLC，同時(shí)它也為上位機(jī)提供現(xiàn)場(chǎng)的數(shù)據(jù)信息。通過(guò)以太網(wǎng)模塊支持以太網(wǎng)通信，同時(shí)也支持RS232和RS485；具有浮點(diǎn)運(yùn)算協(xié)處理器，能進(jìn)行浮點(diǎn)運(yùn)算；內(nèi)置PID功能模塊。
所有回路采用PID控制。其中，液化冷凍工段為三個(gè)串級(jí)控制，用神經(jīng)網(wǎng)絡(luò)進(jìn)行在線辨識(shí)，動(dòng)態(tài)整定控制參數(shù)。
3．2 監(jiān)控級(jí)控制功能的實(shí)現(xiàn)
在總控制臺(tái)，有兩臺(tái)互相備份的工控機(jī)，通過(guò)以太網(wǎng)對(duì)整個(gè)生產(chǎn)線進(jìn)行實(shí)時(shí)監(jiān)控。
Applied Materials 0020-04277 Flange
Applied Materials Cover 0200-40112-B
Applied Ceramics RING, QUARTZ SHADOW MXP, 0200-10176
Fine Series Stainless Steel Valve KC-FUB-71-19.05?-CJN
FURON 3 WAY VALVE 3/8 FLR ULTRA PURE Model UPM3-686
Entegris 1" PFA Hand Valve, KC-HFM-16F
Allen-Bradley Feed Through Interface Module KC-1492-IFM
APPLIED CERAMICS COLLAR, 200MM WIDER, 91-01765A
APPLIED MATERIALS PLATEN 5" OD, 01-82622-00
Applied Materials 0020-81224 ARC Chamber
ONEAC FT1115 MRC ECLIPSE STAR 120V 12A AC-POWER SUPPLY
Emoteq Motor / Brake Encoder, QB02300-T04-HBE
Applied Materials 0040-9529
Shumacher I/O Controller Board 1730-3009
Leitz Wetzlar PL Fluotar 20x/0.45 567012
Leica ∞/- PL Fluotar optics 10x/0.25 567010
WATLOW Heater Imersion 5KW, 220v, Z6643
KLA Instruments 81B Assembly 710-659465-20
LAM, Coupling Leveling Ring, 853-210621-308
BALDOR Assy PUMP Motor W/viton 34H609W315G1
NEC 10.5" LCD Display NL6448BC33-59
PALL Fairy Ring Filter KC-GDF6406E
WARRENDER PVDF WET END, WE5002/ICS
MKS MANOMETER, TYPE 128, 128AA-00010B
Humphrey Solenoid Bank ST053101CJ-02
3 way/port valve
Allied Motion / Emoteq Leadscrew Assy, E3-1000-250-I
FRABA ABSOLUTE ANGLE ENCODER 5813-4096-FBA1D?P03PG
Eurotherm AC Servo Motor, PGH07
BIORAD 8" Cassette, QS600, 013-5363-3
MKS MANOMETER, 0-10, 1/4 VCR, 124AA
EUROTHERM AMPSTACK, 70 AMP, 208 AC, AS-1
TIMNTA INPUT FILTER 3L+N+E, FMAD-0937-8010
EUROTHERM CONTROLLER, 461082
NT INTERNATIONAL FLOW THRU PRESSURE TRANSDUCER
Futurestar FLOWMETER 5 GPM 1/2" Anolog Odyssey
Master Interface PCB w/optional Arcom 123626
Lambda LND X 152 12-15 Volt Regulated Power Supply 2.5A
APPLIED MATERIALS QUARTZ COVER 125mm POLY, 0200-10044
APPLIED MATERIALS Ring, top, 125 mm flat, 0200-00157
COORS Tek, SEMI WAFER. CEL 8.62, 41120-87756-010
Entegris Replacement element kit and wire guards 213-75
Entegris 3/4" PFA Hand Valve KC-201-41-01
BALDOR Industrial Motor MI6B 91751373-03
AMD Liquid Conductivity Assy. FT811-05-001 Rev. A
Applied Materials 0020-82818 APERTURE PLATE - AMI
Applied Materials 0020-86734 CLAMP, FILAMENT L/H
Applied Materials 0020-86733 CLAMP, FILAMENT R/H
Applied Materials 0020-31147
KLA Instruments KLA R1F Assembly 710-652840-20 Rev E1
Absolute Filter Assembly 2T-39516093-Z28?5
Absolute Filter Assembly 2T-69516093-Z28?4
VARITRONICS LABEL AND SIGN MAKER
Applied Materials Shield, Lower, 8", 0200-25077
Applied Materials Ring, Quartz, Pedestal, 0200-09217
TESTO MODEL 490 CALIBRATOR
LEYBOLD STRAIGHT THRU VALVE, 29923
LEYBOLD TR ANGLE VALVE, WITH ACTUATOR, 29823
LEYBOLD INLINE VALVE, VIP-025
Air Products Cable Cabinet Display 2103-0395
MOTOR SERVO W/US DIGITAL ENCODER THERM BHO2302-B11HE
BALLUFF LINEAR TRANSDUCER 305MM, BTL-S-P1-M0305-?P-KA05
Applied Materials 0020-98947 ELECTRODE, EH1 (SIC) - AMI
Applied Materials 0040-97144 STRAP CONNECTOR F.G.
YASKAWA AC BRUSHLESS MOTOR SERVO, SGMP-01U314CM
EMOTEQ BRUSHLESS DC SERVO MOTOR HS01001-A02-HGE
YASKAWA BRUSHLESS AC SERVO MOTOR, SGMP-01U314CM
FLUOROWARE PNEUMATIC MANIFOLD VALVE, 1/2", 710-416X2
ION SYSTEMS FLOW BAR CONTROLLER, 100VAC, 1/4 A
LAM PC Assembly 28-8875-037
LAM/ONTRAK Power Supply 40-0075-007
KOBOLD INSTRUMENTS FLOWMETER, SV-10
CTE CHEM TEC / SEMITOOL ANALOG FLOWMETER,
Flowline Level Transmitter KC-LA15-5001
Semittol Optical Motor Encoder W/Brake
Semitool / Hathaway Motor Encoder W/Brake
APPLIED MATERIALS INC. LINER, SIDE, P19500 AMI
LAM ASSEMBLY GAP HEATING
RTS SPARES LLC ASSEMBLY. SHUTTER, A65
LAM PLATE, BAFFLE, LOWER, 8.3 (4428)
APPLIED MATERIALS COVER, QUARTZ 6" POLY, 0200-00043
DAIFUKU CO., LTD UNIT (S/R) YAGI OPTI, TRANSMIT
Entegris 2 WAY VALVE 3/8 X 1/4 ORIFICE 201-87-01
APPLIED MATERIALSAPERTU?RE, SILICON CARBIDE, EHO AMI
POLY FLOW ENGINEERING MOTOR, GEAR, 3RPM, 1/50TH HP
AMETEK GAS INDICATING PRESSURE SWITCH IPS-200-LA
LAM 9600 Ceramic Consumables Rings
Applied Materials 0010-99166 MOVING CLIP ASSEMBLY
SCANDIALOGIC CONTROLLER, SCM750-1
SEMITOOL DIGITAL FLOWMETER FT0-4A1YS-LHA-1
Pacific Scientific Motor STF3624-5604-61?-56C
Hayward Actuator for drain Valves KC-PHS15
Applied Ceramics RING XL CLAMP SILICON, 91-01394A
Applied Ceramics VALVE SLIT INSERT QUARTZ 91-01680A500
FLOWMETER 5-20 GPM 3/4 FLR ENDS 72056-85
MILLIPORE .05 MICRON QUICK CHANGE FILTER, QCDZATXTH
Applied Materials 0020-82813 ELECTRODE, APERTURE, EHO-
Ultrasonic Ranging Proximity Sensor RPS 300
MILLIPORE WAFERGARD T-LINE GAS FILTER WGGB 12S02
PARKER REGULATOR BACK PRESSURE, BR-3-1168-2
AUTOMOTION MOTOR CONTROLLER ALC1500 MAGNUM
CUTLER-HAMMER INDUSTRIAL CIRCUIT BREAKER, EHD3020L
PARKER REGULATOR DI 0-60PSI 1/2 FNTP PTFE, PR-3-1118-2
Integrated Power Designs Power Supply SRW-115 4005
DATA INSTRUMENTS DIGITAL FLOWMETER, 410500-9022/AFL?AS
NET MERCURY VALVE, PNEUMATIC ACTUATED- GAS
TOKYO ELECTRON SENSOR, ATM PS-10V 760 TORR, TEF
Sensor Technics Pressure Transducer 839-607828/SQ00?503
AP Tech Regulator AP1910SM/889-60?6950
MKS Manometer ABS 124AA-00100BB
Proportion Air PA 70905-27
MAC SOLENOID VALVE 3-WAY 20 STAGE CIRCUIT BAR L 202
Lambda 500W Power Supply FE050048-RA
Integrated Power Designs Power Supply REL-110-4006
Applied Materials 0020-82821
Applied Materials 0020-83583 SHIELD GUIDE TUBE 9500XR
SENSARRAY 6" TEST WAFER PART 1501B-6-0001
MAGNETEK LOADER, 10-349222-01
Futurestar Rotameter-Flowm?eter
Air Products N2 Trickle Purge Plumbing 216730
Control Concepts AC Noise Filter KC-IE-110
Applied Materials, ESC ASSEMBLY 125 MM, 0090-00091
Setra Pressure Transducer 2251100PGD41106
APPLIED MATERIALS SHADOW RING 0200-00156
NT INTERNATIONAL FLOW THRU PRESSURE TRANSDUCER
ASTI Flow Sensor 20 L/min, 3/4 FLR
Entegris 4/2" PFA Hand Valve 201-42-01
APPLIED MATERIALS SCREEN SLIDE ENTRY 9500XR - AMI
DNS ELECTRONICS ARM, 1H (2) - 80A- SCRUBBER
Inbligent Motion Systems (IMS) Microstepper and Index
Pentagon Tech Pedestal, Quartz, Pinless, Q15-0217
BIMBA MOTOR ASSEMBLY WITH HIGH TORQUE PLATING 0G70-S YG
Arcom, I/O Board, w/ standoffs AIM104-RELAY8/I?N8
Air Products AP2 LCD Display 809-607057
Tescom Pressure Regulator 44-2262-242-010
LFE INSTRUMENTS TEMPERATURE CONTROLLER 955241C-1190
Flextech, Cabinet Controller, 2103-0391
EUROTHERM DRIVE, B5261101BZ
Entegris 1/4" Auto valve w/check valve KC-202-69-01
APPLIED MATERIALS DC POWER SUPPLY, 01-81913-00
Saint Gobain Door Seal 480150091
AP2 Solenoid Bank 16V VV3Q11-ULB97019?3-16
Air Products Solenoid Digi. output board 809-607699
NT INTERNATIONAL ACID TRANSDUCER 1/2 FLR 0-60PSI
NT INTERNATIONAL PRESSURE TRANSDUCER FLOW THRU 3/4"
SMC APX16-Point Solenoid Bank 13V VV3Q11-ULB97019?4-13
SMC APX16-Point Solenoid Bank 10V VV3Q11-ULB97019?4-10
Granville-Phill?ips 275 Convectron Gauge For N2
MRC PCB, STEPCONTI/F, 884-55-000
Cable, Sensor, PT-100 85939
Saint Gobain Door Seal 480150089
Nikon PCB 4S018-210A
APPLIED MATERIALS PEDESTAL ASSEMBLY, 0010-09574
Cutler Hammer Industrial Circuit Breaker
Yaskawa Servo Motor, SG25TA-PE01A1
ASTI Flow Sensor 10 L/min, 1/2 FLR
Blue White Flowmeter, 0.2-2.0 gpm, Model F-500
Futurestar Odyssey Flowmeter 1 pm, 1/4 FLR
Futurestar Odyssey Flowmeter 1.75-5 lpm, 3/8 FLR
Futurestar Odyssey Flowmeter 5-250cc, 1/4 FLR
Yaskawa AC Servo Motor, Brushless with Brake
MKS INSTRUMENTS BARATRON, 1 TORR, 370HA
EMOTEQ CORP MOTOR ASSY PADDLE ACTUATING HS01001-A02-HGE
PATLITE SIGNAL TOWER, SL-402V
APPLIED CERAMICS, CERAMIC PLATE, 200MM, 716-028721-281
Cherry Electric exhaust vane switch 1491-3144
ASYS CONTROLLER, 10052885
FURON 1/2", 2 way Valve, DIBPOL8PC
FURON OMNISEAL 3/16" X 12.375" 70887-23
INSERT, INNER, MULTI-CHARGER/B?EAM TRAP MULTI-CHARGED
HATHAWAY/EMOTEQ MOTOR LIFT/TILT, BH02301A F04HBE
Micronix, I/0 board, PV-1648 Rev.3
Arcom, I/0 board, AIM104-ANALOG-I?/O
Air Products Comm. Controller board 287-607240
WESCO DISCONNECT SWITCH, NZM7-200-NA
Yaskawa AC Servo Motor, SGMP-01U314M
BIORAD 5" Cassette, QS600, 013-5363-1
APPLIED MATERIALS FINGER LONG HOLLOW GRIPPER -AMI (SLO
FURON 1/2", 2 way Valve, WB-2W8P-C
LEYBOLD STRAIGHT THRU VALVE, 428902
Air Products LCD Display 1730-7203
AP200 Shuttle adaptor kit, AP20-K-250
APPLIED MATERIALS PCB, SIGNAL CONDITION, ASSEMBLY
APPLIED MATERIALS ARC CHAMBER P19500
LAM RING, CLAMP-UPPER ELECTRODE
Trebor Model 85 Surge Suppressor
Finish Thompson / FTI Vertical Mag Drive VKC80VST336
Finish Thompson / FTI Vertical Mag Drive VKC80VST348
APPLIED MATERIALS INC. VANE, (MRS)P19500 AMI
Speedfam Load Cup
Lambda Power Supply, 500W, 24 VDC, FE050024RA
Applied Materials Gas Distribution Plate
DNS ELECTRONICS ARM, IH (2)- 80A SCRUBBER
OMRON CAPACITIVE PROXIMITY SWITCH, E2K-C25MF1
Applied Materials 0020-82550 HOLDER (MRS) P19500
SMC VALVE SHUTTLE CAM PUMP F25 KT-PA2-38
Semitool OPTICAL BOARD ASSEMBLY 16730-01
APPLIED MATERIALS INC. HOLDER (MRS) P19500
Akrion Steag Valve PVDF610/15/D 7205A1 410200
APPLIED MATERIALS COVERING PIPE, 0020-0930
DNA CERAMIC IH ARM L=110MM 2-F3-31399
DAIFUKU MOTOR, CONV. ORIEN. TRAVEL BODY
Watlow Din-A-Mite DB2C-2060-C050
Yaskawa Digital AC Servo Drive
Lambda Power Supply SC150U03
Lee ATMI Micropump LPVX0505600CA
Applied Materials 0020-81482
Applied Materials 0020-82822
TRIPP LITE UPS System SMARTINT700
ATMOS Air Handling Filter 2FM-22
Clean Room Products Air Handling Filter U3030A00ADACACA
Parker Motor MPC 1140X
Harowe Resolver 31BRCX-500-B1
Pacific Scientific Motor R63FSSA-HS-SS-N?V-04
POLYPURE BATH
SENSOR, SOG FLOW 3x2 N.C. ST215A
DYTEC VALVE, DUMP RINSER, QDV-400-PVDF-V
SMART UPS 1000VA BATTERY BACKUP
APPLIED MATERIALS HEATER BAND FOR TMS KIT, 1410-01124
DWYER PHOTOHELIC GUAGE, KC-3003MR
APPLIED MATERIALS SHOWER HEAD,5B PUTTER ETCH 0020-09933
MIKRO ELEKTRONIK M34, M-Module, 04M034-00
BALZERS ROLLE COUPLING, BB180942-T
EIT SENSOR STIK, 0-25 PPM, SERIES 4500
DELCO BATTERY BACK-UP, RST31
Circuit Board DAMPER CD BG4-8615
Circuit Board M-POS (CONVERTER) BG8-3326 BH8-1970-01
Circuit Board CDIF BG4-6631 BH8-1823 BG8-2676
DAIFUKU CO. LTD. BOARD (TFE) DAIFUKU P.C.-3419B
EARTH LEAKAGE BREAKER ASSEMBLY #5,
Circuit Board LIBRARY CONTROL PCB BG4-8193
HRD SENSOR PCB BG4-6583
CIRCUIT BOARD VEDZ-177 COMBX
JENCONS VAC SEAL
VARIAN TYPE 572 IONIZATION GAUGE, K7360301
Applied Materials 0020-04076
LAM ENCODER ASSEMBLY, MOTOR STEPPER ARM DRIVE
EDWARDS SERIES 1 EXHAUST MODULE
VARIAN ANGLE VALVE, L6281-301
VARIAN ANGLE VALVE, L6281303
Tripp-Lite Power Supply System OMINSMART 700
Applied Materials 0020-25662 SHIELD, CLAMP, SCRWLES- CO
Humphrey Solenoid Bank ST022601CJ-01
3 way/port
LAM PC Assembly 28-8875-012
APPLIED MATERIALS INSERT PINS, SILICON,125 MM,0200-3671
Pepperl+Fuchs Dual Discrete Signal Isolator Switch EX2
LEYBOLD POWER SUPPLY, 100/250
Ontrak Extender Arm Bracket 13-8800-047-02
Swagelok Bellows valve NC ACTUATOR SS-8BK-VCR SS-6BK-1C
Dwyer CFH Flow meter 300PSIG Max
SWAGELOK VALVE 2 WAY 1/4 VCR SS-43GVCR4-1466
Futurestar Fiberoptic Sensor Flowmeter 400-003-80
CONTEMPORARY CONTROLS STANDARD NETWORK CARD SB871660-10
VALVE, AIR OPERATED RK-AOV
MRC Eclipse Receiver Remote Control Board, 883-87-000
METRON TECHNOLOGY, THERM-X RODS 0641-0767-02 TYPE R
USHIO SUPER HIGH PRESSURE MERCURY LAMP USH-350DP
ZIEHL-ABEGG ELECTRONIC SPEED CONTROLLER, PAE10E-M
GasFlo Products, Inc. PT SERIES CGA PT-AP-724SS-4TS
GasFlo Products, Inc. PT SERIES CGA PT-AP-638SS-4TS
Idec 24 VDC Power Supply (CDUs) PS5R-D24
MICRORAM 48V MOTOR AMPLIFIER, 208718-1
DAIFUKU BOARD (MCP) DAIFUKU P.C.
Malema Flow Switch M60-6T-SS-SP
Patlite Light Tower WM-302T
SUNX Wafer Sensor M-826
LAM SERVO MOTOR, 853-013720-608
Baldor 2 HP Motor VM555
Flanders Air Handling Filter
Flanders Air Handling Filter
LAM ASSY, VACUUM SWITCH, 100 TORR 853-017480-002
