Edwards愛德華STP-301C設備泵保養(yǎng),精工精機STP-301分子泵維修,Seiko Seiki STP-301/STP-301C日本精工精機分子泵進氣法蘭口ICF152/VG100/ISO100,出氣法蘭口KF25,抽速可達到300L/s,轉速為48000rpm,VG/ISO法蘭口極限壓力6.5x10-6Pa (5x10-8Torr),ICF法蘭口極限壓力10-7Pa (10-9Torr),精工精機STP-H301C分子泵對應的控制器為:Seiko Seiki SCU-H301C